Fabrication of Mechanical Microstructures Using Amorphous...

MRS Proceedings 2000 / 1 Vol. 609

Fabrication of Mechanical Microstructures Using Amorphous Silicon Films on Glass Substrates

Yeh, Chingwen, Boyce, James B., Ho, Jackson, Lau, Rachel
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Volume:
609
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-609-a21.3
Date:
January, 2000
File:
PDF, 6.01 MB
english, 2000
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