Spectroscopic Ellipsometry for the Characterization of the...

MRS Proceedings 2000 / 1 Vol. 609

Spectroscopic Ellipsometry for the Characterization of the Morphology of Ultra-thin Thermal CVD Amorphous and Nanocrystalline Silicon Thin Films

Hazra, Sukti, Yamanaka, Mitsuyuki, Sakata, Isao, Tsutsumi, Toshiyuki, Maeda, Tatsuro, Taguchi, Hirohisa, Suzuki, Eiichi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
609
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-609-a24.3
Date:
January, 2000
File:
PDF, 187 KB
english, 2000
Conversion to is in progress
Conversion to is failed