Influence of Mechanical Stress on The Electrical Performance of Polycrystalline-Silicon Resistors
Nakabayashi, M., Ohyama, H., Simoen, E., Ikegami, M., Claeys, C., Kobayashi, K., Yoneoka, M., Takami, Y., Sunaga, H., Takizawa, H.Volume:
609
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-609-a29.3
Date:
January, 2000
File:
PDF, 122 KB
english, 2000