Effect of Hydrogen Radical on Properties of Hydrogen in Hydrogenated Microcrystalline Silicon
Itoh, Takashi, Yamana, Noriyuki, Inouchi, Hiroki, Yoshida, Norimitsu, Harada, Hidekuni, Kondo, Hiroaki, Yamamoto, Kanta, Nonomura, Shuichi, Nitta, ShojiVolume:
609
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-609-a6.4
Date:
January, 2000
File:
PDF, 75 KB
english, 2000