Furnace and Rta Injection of Point Defects into CVD-Grown B Doped Si and SiGe
Bonar, Janet M., Mcgregor, Barry M., Cowern, Nick E. B., Dan, Aihua, Cooke, Graham A., Willoughby, Arthur F. W.Volume:
610
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-610-b4.9
Date:
January, 2000
File:
PDF, 109 KB
english, 2000