Silicide engineering: influence of alloying elements on CoSi2 nucleation
Detavernier, C., Van Meirhaeghe, R.L., Maex, K., Cardon, F.Volume:
611
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-611-c8.4.1
Date:
January, 2000
File:
PDF, 95 KB
english, 2000