Sol-Gel Derived Silica Layers for Low- k Dielectrics...

MRS Proceedings 2000 / 1 Vol. 612

Sol-Gel Derived Silica Layers for Low- k Dielectrics Applications

Acosta, Sylvie, Ayral, André, Guizard, Christian, Lecornec, Charles, Passemard, Gérard, Moussavi, Mehdi
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Volume:
612
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-612-d5.26.1
Date:
January, 2000
File:
PDF, 334 KB
english, 2000
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