Performance of Polishing Slurries containing Silica Particles grown by Sol-Gel Method
Bae, Sun Hyuk, So, Jae-Hyun, Yang, Seung-Man, Kim, Do HyunVolume:
613
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-613-e6.5.1
Date:
January, 2000
File:
PDF, 307 KB
english, 2000