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Fundamental Study of Iodate and Iodine Based Slurries for Copper CMP
Lee, Seung-Mahn, Mahajan, Uday, Chen, Zhan, Singh, Rajiv K.Volume:
613
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-613-e7.8.1
Date:
January, 2000
File:
PDF, 337 KB
english, 2000