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CVD of Thin Films of Copper and Cobalt from Different Precursors: Growth Kinetics and Microstructure
Mane, Anil, Shalini, K., Devi, Anjana, Lakshmi, R., Dharmaprakash, M.S., Paranjape, Mandar, Shivashankar, S.A.Volume:
614
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-614-g6.11
Date:
January, 2000
File:
PDF, 578 KB
english, 2000