Morphological, Chemical and Structural Study of Sputtered...

MRS Proceedings 2000 / 1 Vol. 616

Morphological, Chemical and Structural Study of Sputtered Al/Al2O3 Multilayers

Paven-Thivet, C. Le, Aubert, P., Fusil, S., Zozime, A., Malibert, C., Houdy, Ph.
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Volume:
616
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-616-81
Date:
January, 2000
File:
PDF, 1.37 MB
english, 2000
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