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Process Modeling Of The Laser Induced Surface Modification Of Ceramic Substrates For Thermal And Electrical Lines In Microsystems
Gruhn, Herbert, Heidinger, Roland, Rohde, Magnus, Rüdiger, Sabine, Schneider, Johannes, Gahr, Karl-Heinz ZumVolume:
617
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-617-j5.3
Date:
January, 2000
File:
PDF, 2.93 MB
english, 2000