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Effect of Excimer Laser Fluence Gradient on Lateral Grain Growth in Crystallization of a-Si Thin Films
Lee, Minghong, Moon, Seungjae, Hatano, Mutsuko, Suzuki, Kenkichi, Grigoropoulos, Costas P.Volume:
621
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-621-q7.6.1
Date:
January, 2000
File:
PDF, 2.08 MB
english, 2000