SiC epitaxial growth on porous SiC substrates

MRS Proceedings 2000 / 1 Vol. 622

SiC epitaxial growth on porous SiC substrates

Melnychuck, G., Mynbaeva, M., Rendakova, S., Dmitriev, V., Saddow, S. E.
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Volume:
622
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-622-t4.2.1
Date:
January, 2000
File:
PDF, 437 KB
english, 2000
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