Ion Beam Induced Chemical Vapor Deposition of Dielectric Materials
Wanzenboeck, H.D., Lugstein, A., Langfischer, H., Bertagnolli, E., Gritsch, M., Hutter, H.Volume:
624
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-624-163
Date:
January, 2000
File:
PDF, 1.79 MB
english, 2000