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Sub-100 nm Patterning of Aluminum Film by AFM Local Oxidation
Notargiacomo, Andrea, Foglietti, Vittorio, Evangelisti, FlorestanoVolume:
636
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-636-d9.29.1
Date:
January, 2000
File:
PDF, 577 KB
english, 2000