Lateral Superlattices Fabricated with Interferometric...

Lateral Superlattices Fabricated with Interferometric Lithography for Nanoscale Device Applications

Striemer, Christopher C., Fauchet, Philippe M., Tsybeskov, Leonid
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Volume:
638
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-638-f5.13.1
Date:
January, 2000
File:
PDF, 748 KB
english, 2000
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