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Size Reduction of Silicon Nanopillars by Photo-Electrochemical Etching
Juhasz, Robert, Linnros, Jan, Kleimann, PascalVolume:
638
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-638-f8.5.1
Date:
January, 2000
File:
PDF, 2.32 MB
english, 2000