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AlN Acoustic Wave Sensors Using Excimer Laser Micromachining Techniques
Zhong, Feng, Huang, Changhe, Auner, Gregory W.Volume:
639
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-639-g11.28
Date:
January, 2000
File:
PDF, 332 KB
english, 2000