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Modeling for the Diamond-Like Carbon Film Synthesis by Plasma Based Ion Implantation
Miyagawa, Yoshiko, Djurabekova, Flyura, Miyagawa, SojiVolume:
647
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-647-o11.12
Date:
January, 2000
File:
PDF, 417 KB
english, 2000