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Ion-implantation Generated Nanovoids in Si and MgO Monitored by High Resolution Positron Beam Analysis
Eijt, S.W.H., Falub, C.V., van Veen, A., Schut, H., Mijnarends, P.E., van Huis, M.A., Fedorov, A.V.Volume:
647
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-647-o14.11/r9.11
Date:
January, 2000
File:
PDF, 324 KB
english, 2000