Ar Cluster Ion Bombardment Effects on Semiconductor Surfaces
Seki, Toshio, Tsumura, Kazumichi, Aoki, Takaaki, Matsuo, Jiro, Takaoka, Gikan H., Yamada, IsaoVolume:
647
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-647-o9.4
Date:
January, 2000
File:
PDF, 1.17 MB
english, 2000