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AFM and TEM Examination of Surface Grains in LPCVD Silicon Films
Kharas, Dave (Boris), Gambino, R. J., Golubovic-Liakopoulos, N.Volume:
648
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-648-p6.48
Date:
January, 2000
File:
PDF, 2.49 MB
english, 2000