Calculation of Intrinsic Stresses and Elastic Moduli in Nonhomogeneous Thin Films
Andia, Pedro C., Costanzo, Francesco, Gray, Gary L., Yurick, Thomas J.Volume:
653
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-653-z10.3.1
Date:
January, 2000
File:
PDF, 478 KB
english, 2000