New Pt/(Bi,La)4Ti3O12/Si3N4/Si MFIS Structure for FET-Type...

MRS Proceedings 2000 / 1 Vol. 655

New Pt/(Bi,La)4Ti3O12/Si3N4/Si MFIS Structure for FET-Type Ferroelectric Memories by the Sol-Gel Method

Kijima, Takeshi, Fujisaki, Yoshihisa, Ishiwara, Hiroshi
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Volume:
655
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-655-cc3.6.1
Date:
January, 2000
File:
PDF, 669 KB
english, 2000
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