Temperature-Dependent Internal Friction in Silicon Nanoelectromechanical Systems
Evoy, Stephane, Olkhovets, Anatoli, Carr, Dustin W., Parpia, Jeevak M., Craighead, Harold G.Volume:
657
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-657-ee1.3
Date:
January, 2000
File:
PDF, 562 KB
english, 2000