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Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors
Kim, Youngman, Choo, Sung-HoVolume:
657
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-657-ee5.19
Date:
January, 2000
File:
PDF, 79 KB
english, 2000