Tailoring the Structure of Low-Temperature-Deposited Microcrystalline Silicon Films by Biasing the Substrate
Birkholz, Mario, Selle, Burkhardt, Fuhs, Walther, Williamson, Don L.Volume:
664
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-664-a15.4
Date:
January, 2001
File:
PDF, 66 KB
english, 2001