Microcrystalline silicon solar cells prepared by 13.56 MHz...

Microcrystalline silicon solar cells prepared by 13.56 MHz PECVD at high growth rates: Solar cell and material properties

Roschek, Tobias, Rech, Bernd, Beyer, Wolfhard, Werner, Peter, Edelman, Felix, Chack, Albert, Weil, Raoul, Beserman, Robert
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Volume:
664
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-664-a25.5.1
Date:
January, 2001
File:
PDF, 10.50 MB
english, 2001
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