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Low-Temperature (630°C) Epitaxy of Silicon on Seeded Glass by Ion-Assisted Deposition
Aberle, Armin G., Harder, Nils-Peter, Oelting, StefanVolume:
664
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-664-a5.11
Date:
January, 2001
File:
PDF, 2.62 MB
english, 2001