VHF Large Area Plasma Processing on Moving Substrats
Kuske, J., Stephan, U., Terasa, R., Brechtel, H., Kottwitz, A.Volume:
664
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-664-a5.5
Date:
January, 2001
File:
PDF, 358 KB
english, 2001