Electrical Properties and Defect States of Laser...

MRS Proceedings 2001 / 1 Vol. 664

Electrical Properties and Defect States of Laser Crystallized Polycrystalline Silicon Films

Watanabe, Tadashi, Andoh, Nobuyuki, Sameshima, Toshiyuki
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Volume:
664
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-664-a6.10
Date:
January, 2001
File:
PDF, 77 KB
english, 2001
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