Formation of Polycrystalline Silicon Films Using Electrical-Current-Induced Joule Heating
Andoh, Nobuyuki, Takahashi, Hiroyuki, Sameshima, ToshiyukiVolume:
664
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-664-a6.2
Date:
January, 2001
File:
PDF, 79 KB
english, 2001