Nonmelt Laser Annealing of 1 Kev Boron Implanted Silicon

MRS Proceedings 2001 / 1 Vol. 669

Nonmelt Laser Annealing of 1 Kev Boron Implanted Silicon

Earles, Susan, Law, Mark, Jones, Kevin, Talwar, Somit, Corcoran, Sean
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Volume:
669
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-669-j4.1
Date:
January, 2001
File:
PDF, 287 KB
english, 2001
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