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Modeling of Boron Implantation Into Si With Decaborane Ions
Insepov, Zinetulla, Sosnowski, Marek, Yamada, IsaoVolume:
669
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-669-j4.19
Date:
January, 2001
File:
PDF, 348 KB
english, 2001