Polishing and Cleaning of Low K Dielectric Material for ild and Damascene
Wang, Yuchun, Bajaj, Rajeev, Moon, Yongsik, Mai, David, Wijekoon, Kapila, Chen, Yufei, Redeker, FritzVolume:
671
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-671-m7.3
Date:
January, 2001
File:
PDF, 236 KB
english, 2001