Crystallographic and morphological properties of magnetron...

MRS Proceedings 2001 / 1 Vol. 672

Crystallographic and morphological properties of magnetron sputtered Ti and Zr thin films

Chinaglia, Eliane F., Oppenheim, Ivette C.
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Volume:
672
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-671-o3.26
Date:
January, 2001
File:
PDF, 309 KB
english, 2001
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