The Improvement of Thin Polymer Film Properties Through Plasma Immersion Ion Implantation and Deposition Technique
Rangel, Elidiane C., Cruz, Nilson C., Mota, Rogério P., Algatti, Maurício A., Honda, Roberto Y., Kuranaga, Carlos, da, Marcos D.Volume:
672
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-671-o8.17
Date:
January, 2001
File:
PDF, 60 KB
english, 2001