Surface roughness control of the Al and Al2O3 thin films...

Surface roughness control of the Al and Al2O3 thin films deposited by using pulsed DC magnetron sputtering

Qiu, Jinjun, Li, Kebin, Han, Guchang, Guo, Zaibing, Wu, Yihong
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Volume:
672
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-671-o8.36
Date:
January, 2001
File:
PDF, 235 KB
english, 2001
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