Plasma Diagnostics and the Evolution of a Novel Titanium...

MRS Proceedings 2001 / 1 Vol. 672

Plasma Diagnostics and the Evolution of a Novel Titanium Nitride Deposition Process

Muratore, Chris, Moore, John J., Rees, J. Alan, Carter, Dan, Roche, Greg
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Volume:
672
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-672-o3.6
Date:
January, 2001
File:
PDF, 151 KB
english, 2001
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