Low Temperature Deposition of ZnO SiO2 Thin Films on...

Low Temperature Deposition of ZnO SiO2 Thin Films on Polymer Surfaces by Plasma Enhanced CVD

Anma, Hidetaka, Yoshimoto, Yuuji, Tanaka, Mariko, Takatsuka, Hiroyuki, Hatanaka, Yoshinori
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
672
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-672-o8.22
Date:
January, 2001
File:
PDF, 274 KB
english, 2001
Conversion to is in progress
Conversion to is failed