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Low Temperature Deposition of ZnO SiO2 Thin Films on Polymer Surfaces by Plasma Enhanced CVD
Anma, Hidetaka, Yoshimoto, Yuuji, Tanaka, Mariko, Takatsuka, Hiroyuki, Hatanaka, YoshinoriVolume:
672
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-672-o8.22
Date:
January, 2001
File:
PDF, 274 KB
english, 2001