A Mechanistic Study of CC12F2/02 RIE for Bipolar Trench...

MRS Proceedings 1986 / 1 Vol. 68

A Mechanistic Study of CC12F2/02 RIE for Bipolar Trench Isolation

Danner, David A., Petrillo, Edward J., Polcari, Michael R.
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Volume:
68
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-68-15
Date:
January, 1986
File:
PDF, 1.02 MB
english, 1986
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