Silicon Nitride from Microwave Plasma: Fabrication and Characterization
Tessier, Yves, Klemberg-Sapieha, J. E., Poulin-Dandurand, S., Wertheimer, M. R.Volume:
68
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-68-183
Date:
January, 1986
File:
PDF, 304 KB
english, 1986