Plasma Mode Trench Etching with Direct Hydrocarbon...

MRS Proceedings 1986 / 1 Vol. 68

Plasma Mode Trench Etching with Direct Hydrocarbon Injection

Leeke, Steven D., Liu, David Kuan Yu, McVittie, James P.
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Volume:
68
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-68-21
Date:
January, 1986
File:
PDF, 949 KB
english, 1986
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