Deposition of Aluminum Nitride Films Using RF Reactive Sputtering
Kumar, N., Pourrezaei, K., De Maria, R. J., Singh, B.Volume:
68
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-68-357
Date:
January, 1986
File:
PDF, 2.66 MB
english, 1986