Defect investigation of GaN thin films etched by photo-electrochemical and hot wet etching by atomic force and transmission electron microscopy
Visconti, P., Jones, K. M., Reshchikov, M. A., Cingolani, R., Morkoç, H., Molnar, R. J., Smith, D. J.Volume:
680
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-680-e5.8
Date:
January, 2001
File:
PDF, 1.92 MB
english, 2001