Direct Bonding of Silicon Wafers with Simultaneous Dopant...

MRS Proceedings 2001 / 1 Vol. 681

Direct Bonding of Silicon Wafers with Simultaneous Dopant Diffusion

Grekhov, Igor V., Agrunova, Tatiana S., Kostina, Lioudmila S., Shmidt, Natalia M., Föll, Helmut, Kostin, Konstantin B.
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Volume:
681
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-681-i5.7
Date:
January, 2001
File:
PDF, 804 KB
english, 2001
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