Electrical Properties of Ultra Shallow p Junction on n type...

MRS Proceedings 2001 / 1 Vol. 686

Electrical Properties of Ultra Shallow p Junction on n type Si Wafer Using Decaborane Ion Implantation

Song, Jae-Hoon, Choi, Duck-Kyun, Oh, Min-Seok, Choi, Won-Kook
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Volume:
686
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-686-a3.5
Date:
January, 2001
File:
PDF, 208 KB
english, 2001
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