A Model for Heterogeneous Nucleation and Growth of Silicon...

MRS Proceedings 2001 / 1 Vol. 686

A Model for Heterogeneous Nucleation and Growth of Silicon Nanoparticles on Silicon Dioxide from Disilane

Leach, William T., Zhu, Jian-Hong, Ekerdt, John G., Mashiro, Supika, Sakai, Junro, Kawshima, Takayuki
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Volume:
686
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-686-a6.3
Date:
January, 2001
File:
PDF, 74 KB
english, 2001
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