Fabrication of MEMS Tonpilz Transducers

MRS Proceedings 2001 / 1 Vol. 687

Zhou, Q. F., Wang, L.-P., Gerber, G., Meyer, R., Tol, D. Van, Tadigadapa, S., Hughes, W. J., Trolier-McKinstry, S.

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Volume:

687

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-687-b5.22

Date:

January, 2001

File:

PDF, 820 KB

english, 2001

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